Pressure transducers for cryogenic liquids

Abstract

A universal design of strain-gauge pressure transducers for measuring the pressure of cryogenic liquids is proposed. The transducers are based on p-type silicon whiskers with different boron concentrations, mounted on invar elastic elements (beams), and operate in the strain range ε = ±1.2·10⁻³ and temperature range 4.2–300 K. The possibility of developing pressure transducers for liquid nitrogen and liquid helium using the classical piezoresistive effect is demonstrated, as well as achieving a significant increase in sensitivity through the non-classical piezoresistive effect near the metal–insulator transition. Examples of developed pressure transducers for cryogenic liquids are presented.