VLSI for a microelectronic position-sensitive detector used in instruments for elemental analysis of materials

  • V. P. Sidorenko Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • V. G. Verbitskiy Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • Yu. V. Prokofiev Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • A. Yu. Kyziak Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • Yu. E. Nikolayenko Ministry of Industrial Policy of Ukraine, Kyiv, Ukraine
Keywords: VLSI, element analysis, microelectronic coordinate-sensitive detector

Abstract

The developed VLSI chip provides simultaneous analysis of all elements included in the substance with high sensitivity and accuracy. The VLSI contains 384 detectors with a pitch of 25 μm. The use of the microcircuit significantly reduces the weight, dimensions, and power consumption of the detector, as well as the analysis time and the amount of the substance being studied.

Published
2009-04-30
How to Cite
Sidorenko, V. P., Verbitskiy, V. G., Prokofiev, Y. V., Kyziak, A. Y., & Nikolayenko, Y. E. (2009). VLSI for a microelectronic position-sensitive detector used in instruments for elemental analysis of materials. Technology and Design in Electronic Equipment, (2), 25-29. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.2.25
Issue
No. 2 (2009): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2009 Sidorenko V. P., Verbitskiy V. G., Prokofiev Yu. V., Kyziak A. Yu., Nikolayenko Yu. E.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.