Evaporator for thermal deposition of materials in vacuum

  • V. I. Bosyi SPE "Saturn", Kyiv, Ukraine
  • V. P. Kokhan SPE "Saturn", Kyiv, Ukraine
  • N. M. Rakhmanov SPE "Saturn", Kyiv, Ukraine
Keywords: deposition, evaporator, band heater, crucible, temperature distribution

Abstract

The design of an evaporator intended for material deposition in vacuum-coating systems is considered, which has been successfully employed in the technological process of fabricating gallium arsenide transistors, diodes, and monolithic circuits.

Published
2008-10-30
How to Cite
Bosyi, V. I., Kokhan, V. P., & Rakhmanov, N. M. (2008). Evaporator for thermal deposition of materials in vacuum. Technology and Design in Electronic Equipment, (5), 56-57. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.5.56
Issue
No. 5 (2008): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2008 Bosyi V. I., Kokhan V. P., Rakhmanov N. M.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.