Optical temperature sensor based on nanocrystalline SiC film

  • A. V. Lopin STC «Institute for Single Crystals» of NASU, Kharkiv, Ukraine
  • A. V. Semenov STC «Institute for Single Crystals» of NASU, Kharkiv, Ukraine
  • V. M. Puzikov STC «Institute for Single Crystals» of NASU, Kharkiv, Ukraine
Keywords: fiber-optic temperature sensors, nanocrystalline silicon carbide films, direct ion deposition, Fabry–Perot interferometer

Abstract

An interference temperature sensor has been developed using nanocrystalline films of cubic silicon carbide deposited directly by ion flow onto a leucosapphire substrate. The optical properties and thermal sensitivity of the “nanocrystalline SiC film/leucosapphire” structures have been measured and analyzed.

Published
2007-08-30
How to Cite
Lopin, A. V., Semenov, A. V., & Puzikov, V. M. (2007). Optical temperature sensor based on nanocrystalline SiC film. Technology and Design in Electronic Equipment, (4), 19-22. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.19
Issue
No. 4 (2007): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2007 Lopin A. V., Semenov A. V., Puzikov V. M.

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This work is licensed under a Creative Commons Attribution 4.0 International License.