Capacitance of a thin rectangular conductor in an integrated circuit

Abstract

The differences between the charge distribution within the volume of current-carrying conductors in integrated circuits and that within the volume of isolated plates are demonstrated. An estimate of the error in capacitance calculation under the assumption of infinitesimal conductor thickness is provided. A method for evaluating capacitance in cases of unknown charge distribution is proposed, along with formulas for calculating the potential coefficient of a rectangular thin-film conductor, taking into account its thickness and the charge distribution law in a layered medium.