Network system for monitoring the technological process of semiconductor crystal and thin-film growth

  • R. V. Rogov Yurii Fedkovych Chernivtsi National University, Ukraine
  • S. V. Melnychuk Yurii Fedkovych Chernivtsi National University, Ukraine
  • G. I. Vorobets Yurii Fedkovych Chernivtsi National University, Ukraine
Keywords: technological process, technological object, semiconductors, interface device, computer networks, network protocols

Abstract

A model of a technological network has been proposed and software developed for monitoring parameters and controlling the modes of the technological process of semiconductor crystal and thin-film growth. DLL libraries have been created to provide communication between the client and server parts of the network. The system implements process parameter monitoring, measurement data archiving, and event logging at the objects of the system. The universality of the software makes it possible to optimize the design and setup of a technological network for arbitrary types of equipment.

Published
2005-10-30
How to Cite
Rogov, R. V., Melnychuk, S. V., & Vorobets, G. I. (2005). Network system for monitoring the technological process of semiconductor crystal and thin-film growth. Technology and Design in Electronic Equipment, (5), 52-54. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.5.52
Issue
No. 5 (2005): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2005 Rogov R.V., Melnychuk S. V.,Vorobets G. I.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.