Influence of fast neutron irradiation on epitaxial gallium arsenide
Abstract
The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radiation doses up to 1·1015 cm–2) can serve as a means of improving the properties of the layers by increasing carrier mobility and operation speed. The second one (radiation doses exceeding 5·1015 cm–2) reduces the concentration and mobility of charge carriers.
Copyright (c) 2002 Zavadsky V. A., Lenkov S. V., Lukomsky D. V., Mokritsky V. A.

This work is licensed under a Creative Commons Attribution 4.0 International License.