Dual-function pressure-temperature sensor based on silicon whiskers

  • A. A. Druzhinin Lviv Polytechnic National University, Lviv, Ukraine
  • A. P. Kutrakov Lviv Polytechnic National University, Lviv, Ukraine
  • N. S. Liakh-Kaguy Lviv Polytechnic National University, Lviv, Ukraine
  • A. M. Vuitsyk Lviv Polytechnic National University, Lviv, Ukraine
Keywords: whiskers, silicon, sensor, temperature, pressure

Abstract

The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of applications.

Published
2013-06-14
How to Cite
Druzhinin, A. A., Kutrakov, A. P., Liakh-Kaguy, N. S., & Vuitsyk, A. M. (2013). Dual-function pressure-temperature sensor based on silicon whiskers. Technology and Design in Electronic Equipment, (4), 23-26. Retrieved from http://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.4.23
Issue
No. 4 (2013): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2013 Druzhinin A. A., Kutrakov A. P., Liakh-Kaguy N. S., Vuitsyk A. M.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.