High-temperature pressure sensors with strain gauges based on silicon whiskers

  • A. A. Druzhinin Lviv Polytechnic National University, Lviv, Ukraine
  • A. P. Kutrakov Lviv Polytechnic National University, Lviv, Ukraine
  • I. I. Maryamova Lviv Polytechnic National University, Lviv, Ukraine
Keywords: silicon, strain gauge, pressure sensor, high temperature

Abstract

Studies aimed at the creating of piezoresistive pressure sensors based on silicon whiskers, operating at high temperatures were carried out. Using the glass adhesive for strain gauges mounting on spring elements of covar alloy gave the possibility to elevate the sensor’s operating temperature range. Several modifications of pressure sensors based on the proposed strain-unit design were developed.

Published
2012-12-27
How to Cite
Druzhinin, A. A., Kutrakov, A. P., & Maryamova, I. I. (2012). High-temperature pressure sensors with strain gauges based on silicon whiskers. Technology and Design in Electronic Equipment, (6), 25-28. Retrieved from http://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.6.25
Issue
No. 6 (2012): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2012 Druzhinin A. A., Kutrakov A. P., Maryamova I. I.

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