UDC 621.382

Method of determination of temperature and heat resistance
of the points on the integrated circuit crystal surface

Popov V. M., Klimenko A. S., Pokanevich A. P., Samotovka V. L.

Keywords: integrated circuit, heat resistance, liquid crystal, phase state.

Method for visualization of integrated circuit (IC) surface temperature by means of the liquid crystal film deposited from solution on its surface is proposed. The boundaries of local regions represent isotherms with corresponding phase transitions. On the base of isotherms positions and consumed by IC power thermal resistances between crystal and environment are determined.

Ukraine, Kiev, Research Institute for Microdevices.