UDC 621.793

The equipment for ohmic contacts formation in semi-conductor devices based on А3В5 connections

Aleksandrov S. B., Krupalўnik K. M., Kornilov N. O., Kondratyeva T. O.

Keywords: semiconductor devices, ohmic contacts, electron-beam evaporation.

Technological process features of ohmic contacts formation in semi-conductor devices based on А₃В₅ connections and the general principles of technological modules construction are considered. The results received by means of installations of an electron-beam evaporation of STE EB series and installations of fast thermal annealing of STE RTA series are shown.

Russia, S.-Petersburg, CC «Scientific and Technological Equipment».