UDC 537.311.33:622.382.33

Plastic deformation in nanostructure silicon formation

Smyntyna V. A., Kulinich O. A., Yatsunkiy I. R., Marchuk I. A.

Keywords: nano-structured silicon, plastic deformation.

The quantity and quality analysis of plastic deformation and near-surface silicon layers with nanostructure silicon formation are given in this paper. It is shown, due to high-temperature oxidation and other factors the complex defect structure is generated in near-surface silicon layers. It consists of a disordered silicon layer and a layer of dislocation networks. Silicon dioxide etching and additional chemical treatment allows to obtain nanostructured silicon with given properties.

Ukraine, Odessa I. I. Mechnikov National University.