Three-coordinate piezoceramic scanner based on bimorph piezoelements for probe nanomicroscope

  • V. M. Sharapov Cherkasy State Technological University, Ukraine
  • A. N. Gurjiy Cherkasy State Technological University, Ukraine
  • S. A. Filimonov Cherkasy State Technological University, Ukraine
Keywords: nanomicroscope, piezoceramic scanner, model construction

Abstract

A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillations along the X, Y, and Z coordinates does not exceed –20 dB.

Published
2007-08-30
How to Cite
Sharapov, V. M., Gurjiy, A. N., & Filimonov, S. A. (2007). Three-coordinate piezoceramic scanner based on bimorph piezoelements for probe nanomicroscope. Technology and Design in Electronic Equipment, (4), 13-15. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13
Issue
No. 4 (2007): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2007 Sharapov V. M., Gurjiy A. N., Filimonov S. A.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.