Generalized theoretical approach to the analysis of gas-phase epitaxy processes

Abstract

A generalized methodology for modeling kinetic processes of gas-phase formation and the transport of components under nonequilibrium concentration fields in inhomogeneous temperature conditions is proposed. Probabilistic methods were used to calculate mass transfer characteristics. A system of diffusion equations in integral form is presented. Solutions of these equations for specific systems and reactors make it possible to determine nonequilibrium component concentrations as functions of spatial coordinates and time within the reactor volume.