Measurement of coating thickness during deposition using a capacitive sensor

Abstract

A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the thickness of the applied coating. The authors developed an automated computer system for monitoring coating thickness and created a program for analyzing the deposition process.