Optimization of hardware and software for automation of the SF-20 spectrophotometer
Abstract
The hardware and software for automating measurements and processing spectral characteristics of semiconductor structures using the SF-20 spectrophotometer have been optimized. An electrical interface circuit has been proposed. At the software level, a method of double filtering of measured signals has been implemented. The relative error of the electronic measurement path for optical parameters is less than 0.025%, and the full cycle time for measuring the optical transmission spectrum in the range of 0.19–2.5 μm does not exceed 20 minutes.
Copyright (c) 2006 Vorobets A. I., Vorobets G. I., Melnychuk S. V.

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