Multifunctional pressure and temperature sensor based on SiGe solid solutions

  • A. A. Druzhinin Lviv Polytechnic National University, Ukraine
  • I. P. Ostrovskii Lviv Polytechnic National University, Ukraine
  • S. N. Matvijenko Lviv Polytechnic National University, Ukraine
  • A. M. Vujtsyk Lviv Polytechnic National University, Ukraine
  • S. N. Matvijenko Lviv Polytechnic National University, Ukraine
Keywords: whisker crystal, multifunctional sensor, pressure and temperature sensor, signal processing, microcontroller, AD8555, Atmega8

Abstract

A multifunctional pressure and temperature sensor has been developed with digital signal processing that includes filtering, linearization, and temperature correction of the pressure transducer characteristics. As the sensitive element of the sensor, a strain gauge bridge consisting of strain resistors based on whisker crystals of the Si₁₋ₓGeₓ solid solution is used.

Published
2005-12-30
How to Cite
Druzhinin, A. A., Ostrovskii, I. P., Matvijenko, S. N., Vujtsyk, A. M., & Matvijenko, S. N. (2005). Multifunctional pressure and temperature sensor based on SiGe solid solutions. Technology and Design in Electronic Equipment, (6), 24-26. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.6.24