Use of low-dimensional heterostructures of AIII-BV compounds in pressure sensors

  • I. Ye. Maronchuk Kherson National Technical University, Ukraine
  • A. D. Kucheruk Kherson National Technical University, Ukraine
  • S. Yu. Yerokhin Kherson National Technical University, Ukraine
  • I. V. Chornyi Kherson National Technical University, Ukraine
Keywords: low-dimensional heterostructures, pressure sensors, quantum dots, quantum wells, superlattices, pulse cooling method

Abstract

The possibility of creating various types of pressure sensors based on low-dimensional structures is demonstrated. Fundamentally new ways to expand the dynamic range and linearity of the load characteristics of highly sensitive sensors, based on creating either a set of quantum dots of various sizes or a quantum well width gradient in superlattices, are proposed. Experimental results of the study of epitaxial layers with quantum dots obtained by the pulse cooling method of a saturated melt solution are presented.

Published
2002-12-30
How to Cite
Maronchuk, I. Y., Kucheruk, A. D., Yerokhin, S. Y., & Chornyi, I. V. (2002). Use of low-dimensional heterostructures of AIII-BV compounds in pressure sensors. Technology and Design in Electronic Equipment, (6), 38-43. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2002.6.38
Issue
No. 6 (2002): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2002 Maronchuk I. Yе., Kucheruk A. D., Erochin S. Y., Chorny I. V.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.