Ионизационный отжиг полупроводниковых кристаллов. Часть вторая: эксперимент
Анотація
При облучении полупроводниковых кристаллов мощными (сильноточными) импульсными электронными пучками высоких энергий обнаружен новый вид отжига, названный авторами ионизационным. В данной статье описаны экспериментальные исследования, подтверждающие сделанное ранее теоретическое обоснование.
Посилання
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Авторське право (c) 2014 Гаркавенко А. С., Мокрицкий В. А., Банзак О. В., Завадский В. А.
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