Наноструктурированные антидиффузионные слои в контактах к широкозонным полупроводникам
Анотація
Исследована связь между антидиффузионными свойствами пленок на основе TiB2 и их нанокристаллической структурой, определены оптимальные размеры нанокристаллитов и условия образования нанокристаллической пленки. Применение таких пленок в качестве антидиффузионных слоев в контактах к широкозонным полупроводникам позволяет повысить термостойкость приборов на их основе.
Посилання
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