Thick layers liquid-phase epitaxy method

  • S. N. Dranchuk Odessa National Maritime Academy, Odesа, Ukraine
  • V. A. Zavadskiy Odessa National Maritime Academy, Odesа, Ukraine
  • V. A. Mokritskiy Odesa National Polytechnic University, Odesа, Ukraine
Keywords: epitaxy, solution, melt, diffusion, layer, concentration

Abstract

On the basis of the authors' model of mass transfer, a new method for thick layers epitaxy has been developed. The method provides for the growth of different parts of the layers in two-layer systems obtained from the solution-melt and allows to control the thickness of substrate submelting and the thickness of layers obtained at the upper and lower substrates, in consideration of different crystallized substance transport mechanisms.

Published
2013-06-14
How to Cite
Dranchuk, S. N., Zavadskiy, V. A., & Mokritskiy, V. A. (2013). Thick layers liquid-phase epitaxy method. Technology and Design in Electronic Equipment, (2–3), 58-60. Retrieved from http://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.2-3.58