Hydrogen-stimulated migration of metal atoms in «metal — semiconductor» structures
Keywords:
ohmic contacts, heterodiffusion, atomic hydrogen
Abstract
The article presents experimental results of the effect atomic hydrogen has on the Cu—Ge and Ni—Ge structures. It has been shown experimentally that the treatment of structures at room temperature is accompanied by the introduction of metal atoms with an abnormally high concentration in the surface layers of thickness up to 1 mm.
Published
2012-12-27
How to Cite
Matyushin, V. M., & Zhavzharov, E. L. (2012). Hydrogen-stimulated migration of metal atoms in «metal — semiconductor» structures. Technology and Design in Electronic Equipment, (6), 44-48. Retrieved from http://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.6.44
Section
Articles
Copyright (c) 2012 Matyushin V. M., Zhavzharov E. L.

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