The electric characteristics simulation and structural parameters calculation of Si-based stabilitron with stabilizing voltage 6,5 V
Abstract
The results of an optimization simulation of original manufacturing process and electric characteristics of stabilitrons with stabilizing voltage Ust=(6,5±0,5) V are presented. The flow of manufacturing process of simulated stabilitron includes the n+-type guard rings regions formation in the р-type substrate; the р–n-junction formation in the р-type substrate; intermediate oxide formation; metal deposition. The stabilizing voltage and differential resistance of the stabilitron voltage-current characteristic reverse branch values were received as the result of calculations at the normal, reduced and high temperature.
Copyright (c) 2009 Dudar N. L., Syakerskiy V. S., Koritko N. N.

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