Polozov BP, Fedorovich OA, Golotyuk VN, Marinenko AA, Lukomsky DV. Influence of plasma-chemical etching on the surface structure of silicon wafers for photovoltaic converters. TKEA [Internet]. 2006Apr.30 [cited 2026Apr.11];(2):52-5. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.52