Glushko AA, Rodionov IA, Makarchuk VV. Modeling of submicron CMOS VLSI fabrication processes using TCAD systems. TKEA [Internet]. 2007Aug.30 [cited 2026Mar.14];(4):32-4. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.32