Sharapov VM, Gurjiy AN, Filimonov SA. Three-coordinate piezoceramic scanner based on bimorph piezoelements for probe nanomicroscope. TKEA [Internet]. 2007Aug.30 [cited 2026Mar.14];(4):13-5. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13