Ivanchykau AE, Kisel AM, Medvedeva AB, Plebanovich VI. Modification of organosilicon films properties during the thermal and plasma treatments. TKEA [Internet]. 2009Apr.30 [cited 2025Dec.6];(2):46-0. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.2.46