Popov VM, Shustov YM, Klimenko AS, Pokanevich AP. The influence of low energy argon ion irradiation on generation of electrically active defects in silicon. TKEA [Internet]. 2009Aug.30 [cited 2025Dec.5];(4):48-1. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.4.48