Grigorjantz VV, Dolgov AP, Kochmarev LY, Shilov IP. Microwave plasma-chemical deposition of structures for high-aperture planar optical waveguides. TKEA [Internet]. 2005Dec.30 [cited 2026Apr.15];(6):39-2. Available from: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.6.39