Krylov, V. N., G. Yu. Shcherbakova, and Yu. Yu. Kozina. “Image Alignment of Photomasks in Automated Optical Inspection Systems”. Technology and design in electronic equipment, no. 3 (June 29, 2007): 61-64. Accessed March 15, 2026. https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.3.61.