Ivanchykou, A. E., KiselA. М., MedvedevaА. V., and B. I. Plebanovich. “Methods for Removing Defects Arising During Wet Etching of Polycrystalline Silicon Surface”. Technology and design in electronic equipment, no. 1 (February 28, 2008): 42-47. Accessed February 5, 2026. https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.1.42.