Savytskyi, H. V., A. Yu. Bonchyk, I. I. Izhnin, S. H. Kyyak, I. A. Mohyliak, and I. P. Trostinskyi. “Modernization of the "Onyx" Photonic Annealing System for Semiconductor Wafers”. Technology and design in electronic equipment, no. 6 (December 30, 2002): 45-47. Accessed August 13, 2026. https://www.tkea.com.ua/index.php/journal/article/view/TKEA2002.6.45.