Polozov, B. P., O. A. Fedorovich, V. N. Golotyuk, A. A. Marinenko, and D. V. Lukomsky. “Influence of Plasma-Chemical Etching on the Surface Structure of Silicon Wafers for Photovoltaic Converters”. Technology and Design in Electronic Equipment, no. 2, Apr. 2006, pp. 52-55, https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.52.