Fedorovich, O. A., M. P. Kruglenko, and B. P. Polozov. “Peculiarity of Plasmachemical Etching of Silicon Plate Edges of Photoelectric Converters”. Technology and Design in Electronic Equipment, no. 6, Dec. 2009, pp. 46-49, https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.6.46.