Poltavtsev, Y. G., P. T. Virchenko, and V. V. Kostyuk. “Kinetics of Desorption Cleaning of Silicon Wafer Surfaces in peroxide–ammonia Solutions”. Technology and Design in Electronic Equipment, no. 6, Dec. 2003, pp. 59-60, https://www.tkea.com.ua/index.php/journal/article/view/TKEA2003.6.59.