Polozov, B. P., Fedorovich, O. A., Golotyuk, V. N., Marinenko, A. A. and Lukomsky, D. V. (2006) “Influence of plasma-chemical etching on the surface structure of silicon wafers for photovoltaic converters”, Technology and design in electronic equipment, (2), pp. 52-55. Available at: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.52 (Accessed: 11April2026).