Istomin, A. S. and Semenov, E. I. (2006) “Measurement of coating thickness during deposition using a capacitive sensor”, Technology and design in electronic equipment, (2), pp. 49-51. Available at: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.49 (Accessed: 11April2026).