Sharapov, V. M., A. N. Gurjiy, and S. A. Filimonov. 2007. “Three-Coordinate Piezoceramic Scanner Based on Bimorph Piezoelements for Probe Nanomicroscope”. Technology and Design in Electronic Equipment, no. 4 (August), 13-15. https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13.