Boltovets, M. S., A. G. Borisenko, V. N. Ivanov, FedorovichО. А., V. A. Krivutsa, and B. P. Polozov. 2009. “Forming of 4НSiC p–i–n-Diodes Mesastructures by the Ion-Plasmous Etching Method”. Technology and Design in Electronic Equipment, no. 5 (October), 45-48. https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.45.