Glushko, A. A., Rodionov, I. A., & Makarchuk, V. V. (2007). Modeling of submicron CMOS VLSI fabrication processes using TCAD systems. Technology and Design in Electronic Equipment, (4), 32-34. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.32