Smyntyna, V. A., Kulinich, O. A., Yatsunkiy, I. R., & Marchuk, I. A. (2011). Plastic deformation in nanostructure silicon formation. Technology and Design in Electronic Equipment, (1–2), 22-24. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.1-2.22