Grigoriev, N. N., Kravetsky, M. Y., Pashchenko, G. A., Sypko, S. A., & Fomin, A. V. (2003). Modeling of contactless chemical‑mechanical processes for semiconductor substrate fabrication. Technology and Design in Electronic Equipment, (2), 36-40. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2003.2.36