Artificial intelligence system for technical diagnostics of photomasks

  • Yu. Yu. Kozina Одесский национальный политехнический университет, Одесса, Украина
  • А. А. Kozin Odessa National Polytechnic University, Odessa, Ukraine
Keywords: impedance spectroscopy, aqueous-alcoholic solution, electrochemical cell, Q-factor

Abstract

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result, it will allow to make a small-scale production profitable.

Published
2012-02-28
How to Cite
Kozina, Y. Y., & KozinА. А. (2012). Artificial intelligence system for technical diagnostics of photomasks. Technology and Design in Electronic Equipment, (1), 7-9. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.1.07
Issue
No. 1 (2012): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2012 Козина Ю. Ю., Козин А. А.

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