Properties and practical application of thin CeOx films

  • N. V. Maksimchuk NTUU «Kiev politechnic university», Kyiv, Ukraine
  • A. N. Shmyreva NTUU «Kiev politechnic university», Kyiv, Ukraine
  • A. V. Borisov NTUU «Kiev politechnic university», Kyiv, Ukraine
Keywords: CeOx thin films, biosensor systems, photoresistors, MIS photodiodes, ion-selective field-effect transistors, MIS varactors, bioluminescence, pH registration

Abstract

The properties of CeOx films produced by various methods have been investigated. According to the comparative analisys “metallic mirror oxidation” method allows producing films with significantly better characteristics than the «explosive evaporation» method. Though, the latter method yields higher photosensitivity of CeOx films and structures on their base. In the process, the optimal value of the substrate temperature was determined. Obtained data expand the CeOx application potential in microelectronic sensor sphere.

Published
2010-12-26
How to Cite
Maksimchuk, N. V., Shmyreva, A. N., & Borisov, A. V. (2010). Properties and practical application of thin CeOx films. Technology and Design in Electronic Equipment, (5–6), 54-59. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.54
Issue
No. 5–6 (2010): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2010 Maksimchuk N. V., Shmyreva A. N., Borisov A. V.

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