The optimization of design of the membrane sensor

  • I. I. Rubcevich Branch "Transistor" of JSC "Integral", Minsk, Belarus
  • V. B. Wysotsky Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus
  • N. S. Kovalchuk Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus
Keywords: gas analyzer, multi-layer membrane, silicon nitride, porous aluminum, effective contact area, optimized design

Abstract

The possibility of reducing the power consumed by the gas concentration sensor through the introduction of cracks in the structure of the multi-layered membrane has been considered. The conduction of etching of the peaks of pores in concentrated orthophosphoric acid for increasing of the effected area of contact of platinum with sub layer of porous aluminium has been suggested.

Published
2009-10-30
How to Cite
Rubcevich, I. I., Wysotsky, V. B., & Kovalchuk, N. S. (2009). The optimization of design of the membrane sensor. Technology and Design in Electronic Equipment, (5), 16-19. Retrieved from https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.16
Issue
No. 5 (2009): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2009 Rubcevich I. I., Wysotsky V. B., Kovalchuk N. S.

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