Galvanomagnetic micro position sensors based on germanium microwire
Abstract
Some features of the technology and design of magnetosensitive microsensors containing two galvanomagnetic recombination (GMR) elements based on germanium microwire are considered. The overall dimensions of the microsensor do not exceed 1.8 × 0.6 × 0.6 mm. Voltage sensitivity is 2–8 mV/mT. The output signal does not depend on frequency in the range of 20 Hz to 50 kHz. The possibility of using such microsensors as position sensors is discussed.
Copyright (c) 2006 Aleinikov E. A., Badinter E. Ya., Ioysher A. M., Leporda N. I., Rybalka A. T.

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