Hladkovskiy VV, Kostin EG, Polozov BP, Fedorovich OA, Petriakov VA. The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films. TKEA [Internet]. 2014Dec.24 [cited 2025Sep.16];(5–6):39-5. Available from: http://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.5-6.39