Pilipenko, V. A., V. A. Gorushko, A. N. Petlitskiy, V. V. Ponaryadov, A. S. Turtsevich, and S. V. Shvedov. “Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits”. Technology and Design in Electronic Equipment, no. 2–3, June 2013, pp. 43-57, http://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.2-3.43.