Pilipenko, V. A., V. A. Gorushko, A. N. Petlitskiy, V. V. Ponaryadov, A. S. Turtsevich, and S. V. Shvedov. 2013. “Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits”. Technology and Design in Electronic Equipment, no. 2–3 (June), 43-57. http://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.2-3.43.