PILIPENKO, V. A.; GORUSHKO, V. A.; PETLITSKIY, A. N.; PONARYADOV, V. V.; TURTSEVICH, A. S.; SHVEDOV, S. V. Methods and mechanisms of gettering of silicon structures in the production of integrated circuits. Technology and design in electronic equipment, n. 2–3, p. 43-57, 14 Jun. 2013.